Scanning electron device

Details Scanning electron device Scanning electron device

1975-05-16

1977-03-08

Smith, Alfred E.

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

G21K 700, G01N 2300, H01K 3726

Patent

active

040114503

ABSTRACT:
A scanning electron device having means for creating an electric field for directing secondary electrons to a detecting means comprising auxiliary electrodes and power supplies therefor so as to increase both the output signal intensity and contrast obtained by the electron detector. The field is created by two or more auxiliary electrodes, said specimen being located near the lowest potential electrode.

REFERENCES:
patent: 3792263 (1975-11-01), Hashimoto

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