Scanning electron beam apparatus and methods of processing...

Details Scanning electron beam apparatus and methods of processing... Scanning electron beam apparatus and methods of processing...

2006-02-07

2006-02-07

Lee, John R. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Methods

C250S310000, C250S311000

Reexamination Certificate

active

06995369

ABSTRACT:
One embodiment disclosed relates to a scanning electron beam apparatus. The apparatus includes an electron beam column, a scanning system, and a detection system. Circuitry in the apparatus is configured to store detected pixel data from each scan into one of the multiple frame buffers. A multi-frame data processor is configured to analyze the pixel data available in the multiple frame buffers. Another embodiment disclosed relates to a scanning electron beam apparatus having a data processor is configured to process the image data with a filter function having a filter strength, store results of the processing, and repeat the processing and the storing using various filter strengths. The results of the processing may comprise a critical dimension measurement at each filter strength.

REFERENCES:
patent: 5869833 (1999-02-01), Richardson et al.
patent: 6797955 (2004-09-01), Adler et al.
patent: 6853204 (2005-02-01), Nishiyama et al.

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