Scanning device for scanning tunneling microscope

Details Scanning device for scanning tunneling microscope Scanning device for scanning tunneling microscope

1988-03-25

1990-01-16

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

250307, H01J 3726

Patent

active

048945382

ABSTRACT:
A tip-scanning mechanism for use in a scanning tunneling microscope uses three drivers for driving a probe tip in three perpendicular directions. The drivers each consist of a piezoelectric element. In accordance with the invention, these three drivers are each shaped into a sheet, and the three sheets are stacked on top of each other. Two of the three drivers produce strains parallel to both faces of the drivers when a voltage is applied across the faces of each driver. Thus, rapid scans can be made without producing distortion.

REFERENCES:
patent: 4343993 (1982-08-01), Binnig et al.
patent: 4523120 (1985-06-01), Assard et al.
patent: 4668865 (1987-05-01), Gimzewski et al.
"Scanning Tunneling Microscopy", G. Binnig and H. Rohrer, Surface Science 126 (1983) 236-244.

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