Scanning corpuscular-beam transmission type microscope including

Details Scanning corpuscular-beam transmission type microscope including Scanning corpuscular-beam transmission type microscope including

1976-08-19

1977-08-23

Dixon, Harold A.

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

250306, G01M 2300

Patent

active

040442543

ABSTRACT:
A scanning corpuscular-beam transmission-type microscope including an energy analyzer below the specimen and a first deflection system disposed between the beam source and the specimen. A second deflection system is disposed between the specimen and the energy analyzer for redirecting the beam to the input aperture of the energy analyzer and is rotated with respect to the first deflection system to compensate for rotation of the specimen image by the objective lens of the microscope.

REFERENCES:
patent: 2401315 (1946-06-01), Ramberg
patent: 2547994 (1951-04-01), Bertein
patent: 2580675 (1952-01-01), Grivet et al.
patent: 2688091 (1954-08-01), Tadana et al.
patent: 3504176 (1970-03-01), Thon

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