Scanning charged-particle microscope

Details Scanning charged-particle microscope Scanning charged-particle microscope

2007-03-06

2007-03-06

Shah, Manish S. (Department: 2853)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S311000, C250S307000

Reexamination Certificate

active

09943262

ABSTRACT:
In orer to supply a scanning charged-particle microscope that can achieve both the improvement of resolution and that of focal depth at the same time, a scanning charged-particle microscope is supplied which is characterized in that a passage aperture for limiting the passage of the charged-particle optical beam is located between the charged-particle source and the scanning deflector, and in that a member for limiting the passage of the charged-particle optical beam is provided at least in the center of the passage aperture.

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“Optics for Super Resolution”, edited by Satoshi Kawada (Mar. 20, 1999).

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