Scanning charged beam particle beam microscope

Details Scanning charged beam particle beam microscope Scanning charged beam particle beam microscope

1976-08-02

1977-12-20

Smith, Alfred E.

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

250310, 250396ML, 250398, H01J 3726, G01N 2300

Patent

active

RE0295000

ABSTRACT:
For dark-field imaging of the specimen, a scanning corpuscular-beam micrope is equipped with multiple annular apertures located between the beam source and the specimen on the one hand and between the specimen and the detector on the other hand. The areas of the multiple annular apertures conjointly i.e. complementarily cover the ray path. The aperture situated in front of the detector is surrounded by a wide, radiation-transmitting region. The invention affords utilizing for the generation of the image not only the rays scattered outside of the aperture cone but also a large part of the rays scattered within this cone.

REFERENCES:
patent: 2464419 (1949-03-01), Smith et al.
patent: 3569698 (1971-03-01), Herrman
patent: 3626184 (1971-12-01), Crewe
patent: 3644733 (1972-02-01), Wolf et al.

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