Scanning auger microprobe with variable axial aperture

Details Scanning auger microprobe with variable axial aperture Scanning auger microprobe with variable axial aperture

1976-09-01

1977-09-13

Smith, Alfred E.

Radiant energy

Electron energy analysis

250511, 250513, H01J 3900

Patent

active

040484980

ABSTRACT:
A scanning Auger microprobe in a cylindrical mirror analyzer is provided wherein an aperture plate at the exit stage is controllably variable in aperture size and is positioned near the second order focus point and at the minimum trace of the analyzer. Control of the aperture size is provided in both an infinitely variable arrangement and in a three size exit aperture arrangement.

REFERENCES:
patent: 2352043 (1944-06-01), Ardenne
patent: 2806147 (1957-09-01), Stellmacher et al.
patent: 2852684 (1958-09-01), Payne
patent: 3699331 (1972-10-01), Palmberg
patent: 3735128 (1973-05-01), Palmberg

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