Radiant energy – Inspection of solids or liquids by charged particles
Reexamination Certificate
2005-04-05
2005-04-05
Berman, Jack I. (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
C250S307000, C250S309000, C250S288000
Reexamination Certificate
active
06875981
ABSTRACT:
In a scanning atom probe (100), a surface topography of a specimen (3) is firstly analyzed by a surface topography analyzing unit (20). In the next place, an extraction electrode (5) is aligned to a desired area to be analyzed of a specimen surface. In case of analyzing electronic state of the area to be analyzed, negative bias voltage is impressed onto the specimen (3) from a direct current high voltage supply (2) and field emitted electrons are detected by a screen (9). In case of analyzing atomic arrangement and composition of the area to be analyzed, positive voltage is impressed onto the specimen (3) from the direct current high voltage supply (2) and a pulse generator (1) and positive ions generated by field evaporation are detected by a position sensitive ion detector (11) or a relfectron type mass analyzer (13).
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Isamu Nishikawa, Masafumi Watanabe, Keiji Tanaka, Takaya Yagyu; Shigeru Yamamoto ; Atomic Level Analysis of Electronic Materials by the Atom Probe and Development of 3-Dimentional Scanning Atom Probe; Kanazawa Institute of Technology, Dept. of Materials Science and Technology, The Institute of Electronics, Information and Communication Engineers, Technical Report of IEICE, ED2000 (Dec. 2000).
Kanazawa Institute of Technology
Marger & Johnson & McCollom, P.C.
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