Scanning apparatus for cross-sectional inspection equipment

Details Scanning apparatus for cross-sectional inspection equipment Scanning apparatus for cross-sectional inspection equipment

1976-09-29

1978-08-01

Church, Craig E.

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

250490, G03B 4116

Patent

active

041045270

ABSTRACT:
A scanning apparatus for cross-sectional inspection equipment in which an X-ray source and a detector, which are arranged facing each other with an object in between, reciprocate along and rotate about a required cross-sectional plane of the object. The X-ray source and detector are mounted on a movable frame which is provided on a rotating disc and reciprocate, after being rotated through a small rotating-angle of the rotating disc by means of one drive source and mechanical mechanism. Thus, accurate operating timing and simplified construction are achieved.

REFERENCES:
patent: 3986031 (1976-10-01), Chekroun

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