Scanner for scanning tunneling microscope

Details Scanner for scanning tunneling microscope Scanner for scanning tunneling microscope

1991-12-31

1993-06-29

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

25044211, H01J 3700

Patent

active

052237133

ABSTRACT:
A three-dimensional scanner for moving the probe tip of a scanning tunneling microscope. The scanner has a table equipped with a three-dimensional coarse displacement mechanism. Two xy piezoelectric transducers are so mounted that they can expand in the xy plane perpendicular to the z-axis along which the probe tip extends. The xy transducers are mounted to the table at their rear ends such that they almost intersect each other at right angles at their front ends. A support member is mounted to the almost intersecting front ends of the xy piezoelectric transducers. A z piezoelectric transducer is attached to the support member. This z transducer produces shear deformations in the z-direction. Electrodes are attached to both faces of each of all these piezoelectric transducers. Appropriate voltages are applied to the electrodes to move the probe tip over quite short distances in three dimensions.

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"Surface Studies by Scanning Tunneling Microscopy", G. Binnig et al., Physical Review Letters, The American Physical Society, vol. 49, No. 1 (1982), pp. 57-61.
"Single-tube Three-dimensional scanner for scanning tunneling microscopy", G. Binnig et al., Rev. Sci. Instrum., American Institute of Physics, 57(8), (1986), pp. 1688-1689.
"Novel Three-Dimensional Positioner and Scanner for the STM Using Shear Deformation of Piezoceramic Plates", K. Uozumi et al., Japanese Journal of Applied Physics, vol. 27, No. 1, Jan. (1988), pp. L123-L126.

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