Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Patent
1991-11-12
1993-03-30
Budd, Mark O.
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
310366, 310369, H01L 4108
Patent
active
051987155
ABSTRACT:
This invention relates to Scanning Probe Microscopes (SPMs) and the like that use piezoelectric type scanners. The scanner described herein limits non-linear errors in the vertical scan direction while maintaining a large horizontal scan size. A tube scanner is shown wherein the tube comprises two portions. The first tube has first (x,y) electrodes attached thereto and is of a first piezoelectric material having high sensitivity qualities in response to voltages applied to the first electrodes. The second tube has second (z) elecrodes attached thereto and is of a second piezoelectric material having sensitivity qualities in response to voltages applied to the second electrodes which are lower than those of the first piezoelectric material. In one embodiment, the first tube and the second tube have substantially identical diameters and are attached to each other in end-to-end concentric relationship. In another embodiment, the first tube and the second tube have different diameters and are connected to each other in end-to-end concentric relationship with the second tube associated with z motion having a smaller diameter and being disposed within the first tube associated with x and y motion. To achieve preferred results, the second tube associated with z motion has thinner sidewalls than the first tube.
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Elings Virgil B.
Gurley John A.
Budd Mark O.
Digital Instruments, Inc.
Dougherty Thomas M.
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