Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent
1984-01-12
1986-08-05
Anderson, Bruce C.
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
250396R, G01N 2300
Patent
active
046045236
ABSTRACT:
A scanning electron microscope arrangement has an integral image store connected to receive signals from an electron collector which collects the secondary electrons emitted from the specimen surface in response to impingement by the electron beam. The latter is scanned over the specimen by scanning coils driven by a scan generator. A cathode ray tube is provided which has its separate scan generator and responds to the previously stored signals as they are read out from the store under control of a control unit. Because the arrangement has an integral store, the beam scanning rates of the electron beam and the CRT beam can be entirely independent. The scan generator for the electron beam may therefore have a relatively low rate and therefore a low power rating. The CRT can be a standard type and does not need to be high persistance. The signal to noise ratio of the signals in the store can be increased by repeating the scan of the specimen before reading out the signals.
REFERENCES:
patent: 3628012 (1971-12-01), Plows
patent: 4091374 (1978-05-01), Muller et al.
patent: 4399360 (1983-08-01), Fotino
Radio and Electronic Engineering, Oct. 1982, pp. 479-493.
Cruttwell Ian A.
Knowles William R.
Anderson Bruce C.
Cambridge Instruments Limited
Guss Paul A.
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