Scan type probe microscope and cantilever drive device

Details Scan type probe microscope and cantilever drive device Scan type probe microscope and cantilever drive device

2011-06-07

2011-06-07

Kim, Robert (Department: 2881)

Scanning-probe techniques or apparatus; applications of scanning

Particular type of scanning probe microscopy or microscope;...

Atomic force microscopy or apparatus therefor, e.g., afm probes

C850S036000, C850S038000, C850S050000

Reexamination Certificate

active

07958565

ABSTRACT:
A driving laser unit (11) irradiates a laser beam on a cantilever (5) to cause thermal expansion deformation. A driving-laser control unit (13) performs feedback control for the cantilever (5) by controlling intensity of the laser beam on the basis of displacement of the cantilever (5) detected by a sensor (9). A thermal-response compensating circuit (35) has a constitution equivalent to an inverse transfer function of a heat transfer function of the cantilever (5) and compensates for a delay in a thermal response of the cantilever (5) to the light irradiation. Moreover, the cantilever (5) may be excited by controlling the intensity of the laser beam. By controlling light intensity, a Q value of a lever resonance system is also controlled. It is possible to increase scanning speed of an atomic force microscope.

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International Search Report Dated Aug. 29, 2006.

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