Scan type electron microscope

Details Scan type electron microscope Scan type electron microscope

1993-06-04

1995-03-07

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250306, 250397, H01J 37252

Patent

active

053960670

ABSTRACT:
A scan type electron microscope has an electron beam generating source for generating an electron beam with which a sample is irradiated; a sample chamber, supplied with a gas for effecting a gas amplification, for housing the sample; a secondary electron detecting means, installed in the sample chamber, for detecting secondary electrons gas-amplified by the gas after being generated from the sample with the irradiation of the electron beam; and an electrode, disposed between the sample and the secondary electron detecting means, for absorbing positive ions produced when the secondary electrons are gasamplified by the gas. The electrode may be constituted by a further fine tube extended from a pressure limiting aperture to a position just above the sample and formed with a path of the electron beam. The absorption of the positive ions prevents a positive charge-up of the sample, whereby a voltage between the sample and the secondary electron detecting means can be kept at a fixed level. A scatter of the primary electron beam can also be remarkably reduced so as to eliminate scattered electrons which cause noise.

REFERENCES:
patent: 4720633 (1988-01-01), Nelson
patent: 4785182 (1988-11-01), Mancuso et al.

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