Scan tool recipe server

Details Scan tool recipe server Scan tool recipe server

1998-10-29

2000-12-26

Niebling, John F.

Semiconductor device manufacturing: process

With measuring or testing

438 16, 438 18, 700 95, H01L 2166, G01R 3126

Patent

active

061658057

ABSTRACT:
A method of manufacturing a semiconductor wafer wherein each layer to be scanned is scanned in a scan tool after determination of whether the current recipe is contained in the scan tool. The recipe in the scan tool is compared to the current recipe stored in a server. If the recipe in the scan tool is not the current recipe the current recipe is loaded into the scan tool from the server. The recipes in the server are updated from associated scan tools.

REFERENCES:
patent: 5469361 (1995-11-01), Moyne
patent: 5866437 (1999-02-01), Chen et al.
patent: 5926690 (1999-07-01), Toprac et al.
patent: 5927512 (1999-07-01), Beffa
patent: 5940300 (1999-08-01), Ozaki
patent: 6004827 (1999-12-01), Ryan
patent: 6060328 (2000-05-01), En et al.
patent: 6077357 (2000-06-01), Rossman et al.

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