Semiconductor device manufacturing: process – With measuring or testing
Patent
1998-10-29
2000-12-26
Niebling, John F.
Semiconductor device manufacturing: process
With measuring or testing
438 16, 438 18, 700 95, H01L 2166, G01R 3126
Patent
active
061658057
ABSTRACT:
A method of manufacturing a semiconductor wafer wherein each layer to be scanned is scanned in a scan tool after determination of whether the current recipe is contained in the scan tool. The recipe in the scan tool is compared to the current recipe stored in a server. If the recipe in the scan tool is not the current recipe the current recipe is loaded into the scan tool from the server. The recipes in the server are updated from associated scan tools.
REFERENCES:
patent: 5469361 (1995-11-01), Moyne
patent: 5866437 (1999-02-01), Chen et al.
patent: 5926690 (1999-07-01), Toprac et al.
patent: 5927512 (1999-07-01), Beffa
patent: 5940300 (1999-08-01), Ozaki
patent: 6004827 (1999-12-01), Ryan
patent: 6060328 (2000-05-01), En et al.
patent: 6077357 (2000-06-01), Rossman et al.
Steffan Paul J.
Yu Allen S.
Advanced Micro Devices , Inc.
Hack Jonathan
Nelson H. Donald
Niebling John F.
LandOfFree
Scan tool recipe server does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Scan tool recipe server, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Scan tool recipe server will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-993766