Scan data collection for better overall data accurancy

Details Scan data collection for better overall data accurancy Scan data collection for better overall data accurancy

2006-03-17

2009-06-16

Wells, Nikita (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

C250S234000, C073S105000

Reexamination Certificate

active

07547882

ABSTRACT:
A scan data collection operation includes performing a scanning operation using a scan path that includes a directional component that is additional to a data collection directional component. The collected scan data is mapped to another set of locations, thus allowing for detection of surface features using fewer scans.

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