Scale and encoder including differently spaced pattern lines

Details Scale and encoder including differently spaced pattern lines Scale and encoder including differently spaced pattern lines

1996-04-17

1998-05-05

Henry, Jon W.

Optical: systems and elements

Diffraction

From grating

250237G, 356356, G02B 518, G01B 902

Patent

active

057483736

ABSTRACT:
A scale and encoder are capable of stably outputting a displacement signal with less distortion. The scale has grating pattern lines arranged successively, and the widths of the pattern lines of a second scale are not P/2 but are determined to remove high-order distortion components on the grating pattern. For example, for removing the third and fifth order distortion components, the scale is made to include two slits in which pattern line widths are 17P/30 and 23P/30.

REFERENCES:
patent: 4667099 (1987-05-01), Arai et al.
patent: 5068530 (1991-11-01), Ieki et al.
patent: 5182613 (1993-01-01), Ieki et al.
patent: 5422723 (1995-06-01), Paranjpe et al.
patent: 5428445 (1995-06-01), Holzapfel
patent: 5528364 (1996-06-01), Koike

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