Sandwich arc structure for preventing metal to contact from...

Details Sandwich arc structure for preventing metal to contact from... Sandwich arc structure for preventing metal to contact from...

2006-08-29

2006-08-29

McNeil, Jennifer C. (Department: 1775)

Stock material or miscellaneous articles

Composite

Of inorganic material

Reexamination Certificate

active

07097921

ABSTRACT:
A sandwich ARC structure for preventing metal to contact from shifting, the sandwich ARC structure comprising a first Ti layer formed on a metal laer and a first TiN layer formed on the first Ti layer. A second Ti layer is formed on the first TiN layer and a second TiN layer is formed on the second Ti layer. Wherein the sandwich ARC structure formed of first Ti/first TiN/second Ti/second TiN will reduces the tress between said metal layer and a dielectric layer formed below the metal layer.

REFERENCES:
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patent: 5604155 (1997-02-01), Wang
patent: 5635763 (1997-06-01), Inoue et al.
patent: 6201271 (2001-03-01), Okutoh et al.
patent: 6410986 (2002-06-01), Merchant et al.
Da-Ren Zhuang,VLSI Technology,Jul. 20, 2002, p. 667-668.

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