Measuring and testing – Surface and cutting edge testing – Roughness
Patent
1998-07-27
2000-08-01
Larkin, Daniel S.
Measuring and testing
Surface and cutting edge testing
Roughness
G01B 528, G01B 734
Patent
active
060949724
ABSTRACT:
An xy scanning unit produces a scanning signal along an x-direction and a scanning signal along a y-direction, which are determined by a contour of a sample to be monitored, scanning time of the x-direction, and a pixel number of the x-direction, supplied from a CPU. Then, the xy scanning unit outputs these scanning signals along the x-direction and the y-direction to a piezoelectric scanning apparatus. On the other hand, a second oscillator outputs a sine wave signal having a frequency determined by the scanning time of the x-direction and the pixel number of the x-direction to a second piezoelectric plate. A sample/hold circuit holds observation data of a probe at such timing after preselected time has passed since the output of the second oscillator becomes maximum, and then outputs the held observation data to a differential amplifier and a P.I control system. An output signal Q of the P.I control system is applied to a z-fine-moving electrode of the piezoelectric scanning apparatus, and also is converted into a digital signal by an A/D converter. This digital signal is stored into a memory in a sampling manner.
REFERENCES:
patent: 5467642 (1995-11-01), Hosaka et al.
patent: 5652377 (1997-07-01), Yagi
Inoue Akira
Miyatani Tatsuya
Sakai Fumiki
Watanabe Kazutoshi
Yasutake Masatoshi
Larkin Daniel S.
Seiko Instruments Inc.
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