Sampling feedback system

Details Sampling feedback system Sampling feedback system

2007-10-01

2009-11-10

Nguyen, Kiet T (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

Reexamination Certificate

active

07615747

ABSTRACT:
An electron microscope includes an electron beam source, which produces an electron beam. Scan deflectors direct the electron beam in a pattern across a sample, which thereby emits electrons. The pattern includes line portions and retrace portions. A main detector receives the electrons emitted by the sample, and produces a main signal. Blankers redirect the electron beam into a reference detector during at least a portion of the retrace portions of the pattern. The reference detector receives the electron beam and produces a reference signal. A mixing circuit receives the main signal and the reference signal and adjusts the main signal based at least in part on the reference signal, thereby producing an adjusted signal. An image computer receives the adjusted signal and produces an image of the sample based at least in part on the line portions of the adjusted signal.

REFERENCES:
patent: 6545275 (2003-04-01), Pearl et al.

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