Sample transferring method and sample transfer supporting appara

Details Sample transferring method and sample transfer supporting appara Sample transferring method and sample transfer supporting appara

1998-03-11

2000-07-18

Bushey, C. Scott

Gas separation

Combined or convertible

In vented container

118719, 414220, 438949, B65D 8590

Patent

active

060901764

ABSTRACT:
A method of transferring a sample to and from a treating chamber kept in a vacuum atmosphere through a pressure regulative preparatory chamber. The sample is contained in the sample transfer container, which is kept air-permeable by a dust filtering filter, in a cleaned atmosphere before the sample is transferred to the treating chamber. The sample transfer container is transferred into the preparatory chamber, and the inside of the preparatory chamber is evacuated to a vacuum atmosphere. The sample is then extracted from the sample transfer container in the vacuum atmosphere and is transferred into the treating chamber. Also disclosed is an apparatus for supporting the sample transferring method.

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