Sample transfer unit and sample transferring method

Details Sample transfer unit and sample transferring method Sample transfer unit and sample transferring method

2008-02-27

2010-06-15

Souw, Bernard E (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

C250S441110, C250S311000, C250S310000, C414S217100, C414S217000, C414S805000, C073S863010, C073S864910

Reexamination Certificate

active

07737416

ABSTRACT:
There is provided a mini environment type transfer unit which can efficiently transfer a sample to a critical dimension scanning electron microscope (CD-SEM) even in the case of use of a SMIF pod which can store only one photomask. In addition to a load port, a stocker which can store a plurality of photomasks is provided in the mini environment type transfer unit. A mask storage slot in which a plurality of storage units are stacked is provided in the stocker, and one photomask is stored in each storage unit. A sensor is provided in each storage unit to determine whether or not the photomask is normally stored. Additionally, a sensor is provided in each storage unit to detect whether or not the photomask exists.

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SEMI (Semiconductor Equipment and Materials International), “SEMI E63-0600AE: Mechanical Specification for 300 mm Box Opener/ Loader to Tool Standard (BOLTS-M) Interface”, American National Standards Institute (ANSI), 1997 (including partial English translation of relevant portion).

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