Sample tilting device in electron microscope

Details Sample tilting device in electron microscope Sample tilting device in electron microscope

1988-07-25

1990-08-21

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

2504401, G21K 500

Patent

active

049509098

ABSTRACT:
A sample tilting device for use in an electron microscope provided with a microscope column in which a sample is illuminated by an electron beam. The sample is held in the microscope column and is removably supported by the microscope column so as to be capable of conically moving around a predetermined position. The sample is displacable in a direction transverse to the longitudinal axis of the electron beam by way of a threadable coupling between a motor and the shaft, with the shaft being axially displacable. The motor is supported by the microscope column so as to be rotatable together with the sample around a line passing through a predetermined position and crossing the axis of the electron beam.

REFERENCES:
patent: 4405865 (1983-09-01), Genty et al.
patent: 4710633 (1987-12-01), Suzuki
patent: 4771178 (1988-09-01), Egle et al.

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