Sample surface structure measuring method

Details Sample surface structure measuring method Sample surface structure measuring method

1986-04-16

1988-03-22

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Methods

250310, 2504922, H01J 3700

Patent

active

047330740

ABSTRACT:
A sample surface structure measuring method using a scanning type electron microscope featured by scanning the sample surface by an electron beam incident from above the sample surface; measuring the amount of the secondary electrons discharged according to the three-dimensional structure of the sample surface by the scanning; and determining the three-dimensional structure of the sample surface from the amount of the secondary electrons measured based on a relation existing between the predetermined three-dimensional structure and the amount of the secondary electrons discharged.

REFERENCES:
patent: 3329813 (1967-07-01), Hashimoto
patent: 3597607 (1971-08-01), Campbell et al.
patent: 3876879 (1975-04-01), McAdams et al.
patent: 4221965 (1980-09-01), Konishi et al.
patent: 4556797 (1985-12-01), Kuni et al.

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