Sample surface observation method

Details Sample surface observation method Sample surface observation method

2008-10-02

2010-11-09

Wells, Nikita (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Methods

C250S310000, C250S492220, C250S492200, C250S492300, C250S306000

Reexamination Certificate

active

07829853

ABSTRACT:
A surface of a sample is observed by acquiring an image of the surface of the sample. An electron beam I irradiated onto the surface of the sample in which wiring including an insulation material and an electrically conductive material is formed. Electrons that acquired structure information regarding a structure of the surface of the sample are detected. An image of the surface of the sample is acquired by a result of the detection of electrons. The surface of the sample is observed using the acquired image of the surface of the sample. The electron beam is irradiated onto the surface of the sample in a state where a brightness of the insulation material and a brightness of the electrically conductive material in the image of the surface of the sample are set equal to each other.

REFERENCES:
patent: 2010/0032566 (2010-02-01), Naito et al.
patent: 2010/0133433 (2010-06-01), Tanimoto et al.
patent: 2004-193017 (2004-07-01), None
patent: 2005-235777 (2005-09-01), None
patent: 2005-292157 (2005-10-01), None
patent: 2007-080987 (2007-03-01), None
Japanese Office Action mail dated Sep. 29, 2009, issued in corresponding Japanese Application No. 2007-259808.

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