Sample-stand for scanning electron microscope

Details Sample-stand for scanning electron microscope Sample-stand for scanning electron microscope

2006-02-28

2006-02-28

Berman, Jack I. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

C250S310000, C250S397000

Reexamination Certificate

active

07005652

ABSTRACT:
The present invention is a sample-stage for a scanning electron microscope. The sample stage has a U-shaped base, horizontally oriented with the closed end forming the right side. A bottom member abuts the bottom of the U-shaped base, forming an interior cavity with the U-shaped base. An angled support member abuts the top of the U-shaped base farthest from the right side for holding a sample at a user-defined angle. A first reflector abuts a portion of the interior right side of the U-shaped base, and a second reflector abuts a portion of the top surface of the bottom member. A beam stop abuts a portion of the right side of the U-shaped base.

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William E. Vanderlinde, “Forward Scattered Scanning Electron Microscopy for Semiconductor Metrology and Failure Analysis”, Proceeedings from the 29th International Symposium for Testing and Failure Analysis, Nov. 2-6, 2003, Santa Clara, CA. USA.

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