Sample stage for scanning probe microscope head

Details Sample stage for scanning probe microscope head Sample stage for scanning probe microscope head

1994-10-06

1996-06-25

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

250306, H01J 3720

Patent

active

055302530

ABSTRACT:
A sample stage of a scanning probe microscope head is capable of changing the direction of a sample plane stably over a wide range in a simple operation. Fixtures fix both ends of an outer flexible tube of a flexible shaft. A displacement lead-in portion displaces one end of an inner flexible tube of the flexible shaft relative to the outer flexible tube, and a displacement lead-out portion and a coupling portion transmit the displacement led in the inner flexible tube of the flexible shaft to a sample carrier portion to turn the sample carrier portion about a turn axis, thereby getting a sample plane to change direction.

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Chiang et al, "An Ultrahigh Vacuum Scanning Tunneling Microscope with Interchangeable Samples and Tips", Journal of Vacuum Science Technology, A 6(2), Mar./Apr. 1988, pp. 386-389.
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Bando et al., "Construction of a Low-Temperature STM with in situ Sample Cleavage", Ultramicroscopy 43-44.

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