Sample shape determination by measurement of surface slope with

Details Sample shape determination by measurement of surface slope with Sample shape determination by measurement of surface slope with

1998-11-04

2000-12-05

Nguyen, Kiet T.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250306, 250307, 2502521, H01J 3728

Patent

active

06157032&

ABSTRACT:
The shape of a sample is determined with a scanning electron microscope ("SEM") by using electron emission from a surface to measure its slope. A surface of a sample is placed in the SEM's electron beam for several known angles, and respective measurements of the electron emission are obtained. A relationship between surface angle and electron emission is derived for the sample from the measurements. Then, as the electron beam is scanned along the surface to measure electron emission, this derived relationship is used to obtain the slope at each scanning point.

REFERENCES:
patent: 4567364 (1986-01-01), Kano et al.
patent: 4767926 (1988-08-01), Murakoshi et al.
patent: 4910398 (1990-03-01), Komatsu et al.
J. Goldstein et al: "Scanning Electron Microscopy and X-Ray Microanalysis", Plenum Publishing, 1992, pp. 198-203 and 206-215.

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