Sample relocation method in charged particle beam apparatus...

Details Sample relocation method in charged particle beam apparatus... Sample relocation method in charged particle beam apparatus...

2011-01-18

2011-01-18

Souw, Bernard E (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S306000, C250S307000, C250S440110, C250S442110

Reexamination Certificate

active

07872231

ABSTRACT:
In a chamber of a charged particle beam apparatus, the sample on the sample substrate is gripped and carried to the sample holder, and there is controlled the attitude of the sample when the sample is fixed on the sample holder. There possesses a marking process applying, in the chamber, a marking to a surface of the sample Wb existing on the sample substrate by a beam, a carriage process gripping the sample by a sample gripping means and carrying it from the sample substrate to the sample holder, and an attitude control process controlling, when fixing the sample to the sample holder, the attitude of the sample while observing the marking applied to the surface of the sample.

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