Sample observing apparatus and sample observing method

Details Sample observing apparatus and sample observing method Sample observing apparatus and sample observing method

2007-08-28

2007-08-28

Wells, Nikita (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S307000, C250S311000

Reexamination Certificate

active

11165572

ABSTRACT:
There is provided a sample observing apparatus for observing the surface of a sample by irradiating an electron beam thereto, having an electron gun for irradiating the electron beam to the surface of the sample, a potential control section for adjusting electric potential of the surface of the sample to potential set in advance by applying voltage determined based on an amount of electric charge on the surface of the sample to the sample, an electron detecting section for detecting electrons produced when the electron beam is irradiated to the surface of the sample and an appearance acquiring section for acquiring the appearance of surface of the sample per each spot on the surface based on the electrons detected by the electron detecting section.

REFERENCES:
patent: 2002/0005484 (2002-01-01), Nishimura
patent: 2003/0213893 (2003-11-01), Nagahama et al.
patent: 2001-110347 (2001-04-01), None
patent: 2002-245960 (2002-08-01), None
Patent Abstracts of Japan, Publication No. 2002-245960, Publication Date: Aug. 30, 2002, 2 pages.
Patent Abstracts of Japan, Publication No. 2001-110347, Publication Date: Apr. 20, 2001, 1 page.
International Search Report for PCT/JP03/15476 mailed on Mar. 16, 2004, 1 page.

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