Sample-moving automatic analyzing apparatus

Details Sample-moving automatic analyzing apparatus Sample-moving automatic analyzing apparatus

1991-07-16

1993-03-09

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

2504922, H01J 3726

Patent

active

051928663

ABSTRACT:
A sample is analyzed by irradiating it with a charged-particle beam and detecting characteristic X-rays. The surface of the sample is magnified and displayed on a CRT, and analytical areas, analytical positions and a travel path for the charged-particle beam are designated on the image displayed by the CRT. The travel path of the charged-particle beam is designated by an operator via an input unit while the operator observes the image on the CRT. It is also possible to compute and designate the travel path by an arithmetic unit based on positional coordinate data indicative of the analytical areas, analytical positions and non-irradiated areas without requiring an operation by the operator.

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