Sample measurement method and measurement sample base material

Details Sample measurement method and measurement sample base material Sample measurement method and measurement sample base material

2007-03-13

2007-03-13

Berman, Jack I. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Methods

C250S304000, C250S311000, C250S310000

Reexamination Certificate

active

10926951

ABSTRACT:
A sample measurement method is a sample measurement method by an electron microscope and includes the film formation step of forming a sample on a projection on the major surface of a substrate, the electron beam irradiation step of irradiating the sample with an electron beam from a side of the projection, and the measurement step of detecting an electron beam which is generated or reflected from or has passed through the sample irradiated with the electron beam. Since the sample is formed on the projection on the major surface of the substrate, the sample on the projection can be formed as a thin film. For this reason, sample measurement can be executed only by irradiating the sample from a side of the projection.

REFERENCES:
patent: 5525806 (1996-06-01), Iwasaki et al.
patent: 6395347 (2002-05-01), Adachi et al.
patent: 6538254 (2003-03-01), Tomimatsu et al.
patent: A 5-231997 (1993-09-01), None
patent: A 10-19751 (1998-01-01), None
“Device Analysis Guidebook”; Edited by Japan Society for Analytical Chemistry, Maruzen Co. Ltd.,; Jul. 10, 1996; pp. 138-142 w/transl.
“Transmission Electron Microscope”; Edited by Surface Science Society of Japan, Maruzen Co. Ltd.,; Apr. 15, 2001; pp. 33-42 w/transl.

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