Sample manipulation device

Details Sample manipulation device Sample manipulation device

2011-08-23

2011-08-23

Johnston, Phillip A (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

C250S306000

Reexamination Certificate

active

08003955

ABSTRACT:
A sample manipulation device comprises an observation unit, which is used to observe a sample and to select a target position at which a portion to be removed from the sample is located, and a specimen stage which receives the sample. The sample manipulation device may include a manipulation tool, which is spatially shiftable relative to the observation unit and comprises a manipulation tip by which portions are removed from the sample, a control unit, which controls the shifting of the manipulation tool, as well as an optical position measurement unit, which is connected to the control unit and is used to determine the actual position of the manipulation tip, so that specific shifting of the manipulation tip to the target position can be carried out.

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Suzuki, Akihiro, et al, “Automated Micro Handling,”Proceedings 2003 IEEE International Symposium on Computational Intelligence in Robotics and Automation, Jul. 16-20, 2003, pp. 348-353, Kobe, Japan.

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