Sample inspection method, sample inspection apparatus, and...

Details Sample inspection method, sample inspection apparatus, and... Sample inspection method, sample inspection apparatus, and...

2007-12-06

2010-06-29

Berman, Jack I (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

C250S306000, C250S307000, C250S310000, C250S492300

Reexamination Certificate

active

07745785

ABSTRACT:
A sample holder is offered which is used when a sample is inspected by irradiating the sample with a primary beam consisting of a charged-particle beam (such as an electron beam) via a film. Furthermore, method and apparatus for preventing destruction of the film due to a pressure difference by detecting damage to the film during inspection are offered.

REFERENCES:
patent: 06-318445 (1994-11-01), None
patent: 2004-515049 (2004-05-01), None
Green, Evan Drake Harrima, Ph.D., Atmospheric Scanning Electron Microscope, Chapter I, Introduction, Stanford University, 1993, pp. 1-12.

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