Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
Reexamination Certificate
2011-04-12
2011-04-12
Berman, Jack I (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Analyte supports
C250S310000, C250S309000, C250S441110
Reexamination Certificate
active
07923700
ABSTRACT:
Sample inspection apparatus, sample inspection method, and sample inspection system are offered which can give a stimulus to a sample held on a film when the sample is inspected by irradiating it with a primary beam (e.g., an electron beam or other charged-particle beam) via the film. The apparatus has the film, a vacuum chamber, primary beam irradiation column, signal detector, and a controller for controlling the operations of the beam irradiation column and signal detector. The sample is held on a first surface of the film opened to permit access to the film. The vacuum chamber reduces the pressure of the ambient in contact with a second surface of the film. The irradiation column irradiates the sample with the primary beam via the film from the second surface side. The detector detects a secondary signal produced from the sample in response to the irradiation.
REFERENCES:
patent: 5312519 (1994-05-01), Sakai et al.
patent: 7745802 (2010-06-01), Nishiyama et al.
patent: 2004/0046120 (2004-03-01), Moses et al.
patent: 2005/0173632 (2005-08-01), Behar et al.
patent: 2009/0242762 (2009-10-01), Nishiyama et al.
patent: 2009/0250609 (2009-10-01), Nishiyama et al.
patent: 2009/0314955 (2009-12-01), Nishiyama et al.
patent: 2010/0051803 (2010-03-01), Koizumi et al.
patent: 06-318445 (1994-11-01), None
patent: 2004-515049 (2004-05-01), None
Green, Evan Drake Harriman, Chapter 1. Introduction, Atmospheric Scanning Electron Microscopy, Stannford University, 1992, pp. 1-12.
Berman Jack I
Jeol Ltd.
The Webb Law Firm
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