Sample inspection apparatus

Details Sample inspection apparatus Sample inspection apparatus

2006-12-19

2006-12-19

Wells, Nikita (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

C250S443100, C250S310000, C250S311000, C250S397000

Reexamination Certificate

active

07151269

ABSTRACT:
A sample inspection apparatus comprises a sample support; a detection system for detecting radiation emitted by or transmitted through a sample on the sample support in response to radiation incident on the sample; and a cooling system for cooling at least one of the sample support and detection system. The cooling system includes at least one oscillating, mechanical component which oscillates at a frequency different from the at least one of the support and detection system.

REFERENCES:
patent: 6573509 (2003-06-01), Radley et al.

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