Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate
2011-06-21
2011-06-21
Vanore, David A (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
C250S305000, C250S307000, C250S309000
Reexamination Certificate
active
07964844
ABSTRACT:
The invention avoids charge up when creating a focus map for an electron beam apparatus for inspecting a sample. An auto-focus (AF) control apparatus controls to drive an actuator for moving a focus lens of an optical microscope while acquiring a contrast signal from the optical microscope for each of focus measurement points on a surface of a sample under control of a PC device, to automatically focus on the surface of the sample. The control apparatus detects a focus value of the optical microscope corresponding to a position (height) of the sample surface in an optical axis direction. The PC device receives the detected focus value, and converts the focus value into a voltage to be applied to an electrostatic lens of the electron beam device during actual sample inspection, and stores the converted value.
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International Search Report of PCT/JP2006/308843, date of mailing Aug. 8, 2006.
Ebara Corporation
Vanore David A
Westerman Hattori Daniels & Adrian LLP
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