Sample holder, method for observation and inspection, and...

Details Sample holder, method for observation and inspection, and... Sample holder, method for observation and inspection, and...

2011-04-19

2011-04-19

Johnston, Phillip A (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Methods

C250S306000, C250S311000

Reexamination Certificate

active

07928380

ABSTRACT:
A sample holder used in SEM (scanning electron microscopy) or TEM (transmission electron microscopy) permitting observation and inspection at higher resolution. The holder has a frame-like member provided with an opening that is covered with a film. The film has a first surface on which a sample is held. The thickness D of the film and the length L of the portion of the film providing a cover over the opening in the frame-like member satisfy a relationship given by L/D <200,000.

REFERENCES:
patent: 3916200 (1975-10-01), Sparks et al.
patent: 7745785 (2010-06-01), Nishiyama
patent: 47-24961 (1972-10-01), None
patent: 6-318445 (1994-11-01), None
patent: 2007-292702 (2007-11-01), None
patent: 2007-294365 (2007-11-01), None

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