Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
Reexamination Certificate
2006-01-10
2008-03-18
Berman, Jack I. (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Analyte supports
C156S345300, C156S345390
Reexamination Certificate
active
07345288
ABSTRACT:
A sample holder and ion-beam processing system are offered which permit a good sample adapted for observation (such as TEM (transmission electron microscopy) observation). The sample holder has a sample placement portion having a sample adhering surface. The holder further includes a shielding material guide portion placed over the sample placement portion. The guide portion is fixedly mounted to the sample placement portion and has a shielding material guide surface. The sample adhering surface is in a position lower than the position of the shielding material guide surface by a given amount of 40 μm. Therefore, when the sample having a thickness of 100 μm is attached to the sample adhering surface, the sample protrudes 60 μm ahead of the shielding material guide surface. The shielding material having a thickness of about 20 μm is then placed in position over the shielding material guide surface.
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Berman Jack I.
Jeol Ltd.
The Webb Law Firm
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