Sample holder and ion-beam processing system

Details Sample holder and ion-beam processing system Sample holder and ion-beam processing system

2008-03-18

2008-03-18

Berman, Jack I. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

C156S345300, C156S345390

Reexamination Certificate

active

11328721

ABSTRACT:
A sample holder and ion-beam processing system are offered which permit a good sample adapted for observation (such as TEM (transmission electron microscopy) observation). The sample holder has a sample placement portion having a sample adhering surface. The holder further includes a shielding material guide portion placed over the sample placement portion. The guide portion is fixedly mounted to the sample placement portion and has a shielding material guide surface. The sample adhering surface is in a position lower than the position of the shielding material guide surface by a given amount of 40 μm. Therefore, when the sample having a thickness of 100 μm is attached to the sample adhering surface, the sample protrudes 60 μm ahead of the shielding material guide surface. The shielding material having a thickness of about 20 μm is then placed in position over the shielding material guide surface.

REFERENCES:
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patent: 5907157 (1999-05-01), Yoshioka et al.
patent: 6914244 (2005-07-01), Alani
patent: 2005/0081997 (2005-04-01), Yoshioka et al.
patent: 2003-173754 (2003-06-01), None

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