Sample carriage for scanning probe microscope

Details Sample carriage for scanning probe microscope Sample carriage for scanning probe microscope

1992-11-09

1993-11-09

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

250306, 250307, H01J 3720

Patent

active

052605779

ABSTRACT:
A sample carriage, for receiving a sample to be scanned and positionable in a scanning probe microscope, is used for physically decoupling the sample from the scanning probe microscope assembly. The sample carriage, constructed from low thermal coefficient material, is physically decoupled by releasably clamping a sample carriage to a bridge support.

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IBM Technical Disclosure Bulletin, "Dynamic Vibration Isolation for Sensitive Apparatus", J. Gimzewski et al, Dec. 1986, vol. 29, No. 7, pp. 2935-2936.

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