Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
Patent
1992-11-09
1993-11-09
Anderson, Bruce C.
Radiant energy
Inspection of solids or liquids by charged particles
Analyte supports
250306, 250307, H01J 3720
Patent
active
052605779
ABSTRACT:
A sample carriage, for receiving a sample to be scanned and positionable in a scanning probe microscope, is used for physically decoupling the sample from the scanning probe microscope assembly. The sample carriage, constructed from low thermal coefficient material, is physically decoupled by releasably clamping a sample carriage to a bridge support.
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Abraham David W.
Hammond James M.
Klos Martin A.
Roessler Kenneth G.
Stowell Robert M.
Anderson Bruce C.
International Business Machines Corp.
Strimaitis Romualdas
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