Sample analysis apparatus using electron beam irradiation

Details Sample analysis apparatus using electron beam irradiation Sample analysis apparatus using electron beam irradiation

1975-09-03

1977-04-26

Smith, Alfred E.

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

H01J 3706

Patent

active

040203530

ABSTRACT:
In a sample analysis apparatus, a sample to be analyzed is irradiated by the electron beam from an electron gun, and the information obtained from the sample and characteristic of the sample is detected for the analysis of the sample. The electron gun and the sample are placed respectively in an electron gun chamber and in a sample chamber. An intermediate chamber is located between the electron gun chamber and the sample chamber. That portion of the sample chamber which contains the sample is protuberant into the intermediate chamber. The intermediate chamber is evacuated to a degree of vacuum higher than the sample chamber but lower than the electron gun chamber.

REFERENCES:
patent: 2292087 (1942-08-01), Ramo
patent: 2602899 (1952-07-01), Page
patent: 2892087 (1959-06-01), Day
patent: 3870882 (1975-03-01), Larson

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