Salt suitable for an acid generator and a chemically...

Details Salt suitable for an acid generator and a chemically... Salt suitable for an acid generator and a chemically...

2011-01-04

2011-01-04

Chu, John S (Department: 1795)

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Radiation sensitive composition or product or process of making

C430S921000, C430S922000, C560S126000, C562S109000, C562S113000

Reexamination Certificate

active

07862980

ABSTRACT:
The present invention provides a salt represented by the formula (I):wherein P1, P2, P3, Q1, Q2and R are defined in the specification and the present invention further provides a chemically amplified resist composition comprising the salt represented by the above-mentioned formula (I).

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