Safety sampler for hot acid in semiconductor manufacturing fab

Details Safety sampler for hot acid in semiconductor manufacturing fab Safety sampler for hot acid in semiconductor manufacturing fab

1996-06-03

1998-05-05

Powell, William

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With microwave gas energizing means

216 84, H01L 2100

Patent

active

057468761

ABSTRACT:
A chemical apparatus is proposed where sampling of hazardous materials in semiconductor fabs, or manufacturing lines, is made easier and more productive. A sampler cup is provided which has a spout and a relatively long handle which in turn is equipped with a round shield fitted close to its end. The shield is used to protect the operator from the chemical effects and heat of the sampled substance. The cup is then placed into a second container, or a beaker, which has formed on its open edge notches where the long handle of the cup can be placed with ease. As a further means for secure placement, the cup has a recess at the bottom surface on the outside such that it captures a pedestal that is formed at the bottom of the beaker on the inside. Furthermore, the beaker has a handle which is protected by a still another protective sleeve formed in cylindrical shape around the handle. In this manner, the cup is held in one hand, while the beaker in the other, and the hazardous material is transported readily. It is shown that where such apparatus is not available in prior art, as much as four hours per day can be saved in a manufacturing line, because with the disclosed apparatus, hot sampling can be done without having to shut down the line and wait for the process tank to cool down.

REFERENCES:
patent: 3959046 (1976-05-01), Bussmann et al.
patent: 4448635 (1984-05-01), Kuiken et al.
patent: 4501636 (1985-02-01), Valley
patent: 4578137 (1986-03-01), Kring
patent: 5236750 (1993-08-01), Duret et al.
patent: 5325730 (1994-07-01), Wang

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