Gas and liquid contact apparatus – Contact devices – Liquid tank
Reexamination Certificate
2011-07-05
2011-07-05
Bushey, Scott (Department: 1776)
Gas and liquid contact apparatus
Contact devices
Liquid tank
C261SDIG065, C118S726000
Reexamination Certificate
active
07971861
ABSTRACT:
Containers for providing vapor phase reactant from liquid sources include bubbler designs and designs in which carrier gas flows over the liquid surface. Among the bubbler arrangements, a bypass conductance is provided to release excess pressure from the gas volume inside the container, or an enlarged bubbler tube is provided with a volume sufficient to accommodate all possible liquid backflow without having the liquid exit the container. Among the overflow designs, flow dividers provide a tortuous path for the gas to increase the time exposure of carrier gas packets to the evaporating liquid surface. The flow dividers can be microporous to encourage capillary action, thereby increasing the evaporating surface. The tortuous gas flow path can be separated from the liquid phase by a breathable semi-porous membrane that permits vapor phase reactant to pass through but prohibits liquid from passing in the other direction.
REFERENCES:
patent: 87192 (1869-02-01), Paine
patent: 113147 (1871-03-01), Dupas et al.
patent: 160410 (1875-03-01), Ferguson
patent: 230656 (1880-08-01), Radkey
patent: 1103789 (1914-07-01), Macey
patent: 1525786 (1925-02-01), Waldo
patent: 1860111 (1932-05-01), Miller
patent: 2206688 (1940-07-01), Bloomheart
patent: 2333898 (1943-11-01), Stevenson et al.
patent: 2485739 (1949-10-01), Johnstone
patent: 2787454 (1957-04-01), Coppola
patent: 2863653 (1958-12-01), Cummings
patent: 3912795 (1975-10-01), Jackson
patent: 3957466 (1976-05-01), Coppola
patent: 3957467 (1976-05-01), Kim
patent: 3989477 (1976-11-01), Wilson et al.
patent: 4268279 (1981-05-01), Shindo et al.
patent: 4290886 (1981-09-01), Takakuwa
patent: 4389973 (1983-06-01), Suntola et al.
patent: 4393013 (1983-07-01), McMenamin
patent: 4436674 (1984-03-01), McMenamin
patent: 4548138 (1985-10-01), Korenberg
patent: 4774032 (1988-09-01), Coates et al.
patent: 4783343 (1988-11-01), Sato
patent: 4883362 (1989-11-01), Gärtner et al.
patent: 4904419 (1990-02-01), Reynolds
patent: 4911101 (1990-03-01), Ballingall et al.
patent: 4947790 (1990-08-01), Gärtner et al.
patent: 5053132 (1991-10-01), Sirkar
patent: 5078759 (1992-01-01), Kira
patent: 5143526 (1992-09-01), Lee et al.
patent: 5199603 (1993-04-01), Prescott
patent: 5261933 (1993-11-01), Greene
patent: 5385689 (1995-01-01), Tom et al.
patent: 5543043 (1996-08-01), Bates et al.
patent: 5551278 (1996-09-01), Rounbehler et al.
patent: 5582647 (1996-12-01), Kato et al.
patent: 5674574 (1997-10-01), Atwell et al.
patent: 5698037 (1997-12-01), Stauffer
patent: 5711816 (1998-01-01), Kirlin et al.
patent: 5849089 (1998-12-01), Tsunashima et al.
patent: 5904771 (1999-05-01), Tasaki et al.
patent: 6033493 (2000-03-01), Hertz et al.
patent: 6132492 (2000-10-01), Hultquist et al.
patent: 6220091 (2001-04-01), Chen et al.
patent: 6231641 (2001-05-01), Utigard et al.
patent: 6270839 (2001-08-01), Onoe et al.
patent: 6325017 (2001-12-01), DeBoer et al.
patent: 6582496 (2003-06-01), Cheng et al.
patent: 6905541 (2005-06-01), Chen et al.
patent: 7018478 (2006-03-01), Lindfors et al.
patent: 7156380 (2007-01-01), Soininen
patent: 7186385 (2007-03-01), Ganguli et al.
patent: 7270709 (2007-09-01), Chen et al.
patent: 7497420 (2009-03-01), Soininen
patent: 2001/0042523 (2001-11-01), Kesala
patent: 2003/0053799 (2003-03-01), Lei
patent: 2004/0016404 (2004-01-01), Gregg et al.
patent: 2005/0072357 (2005-04-01), Shero et al.
patent: 2008/0173240 (2008-07-01), Furukawahara et al.
patent: 33 39 625 (1991-01-01), None
patent: 2 151 662 (1985-07-01), None
patent: 011 168092 (1999-06-01), None
patent: 2006 6045637 (2006-02-01), None
patent: WO 2004/011695 (2004-02-01), None
Leskelä et al., “ALS precursor chemistry: Evolution and future challenges,”Journal de PhysiqueIV France 9, 837-852, (1999).
Smith, J.M.,Chemical Engineering Kinetics, 3rdEdition, McGraw-Hill Book Company, p. 268-291 (1981).
Smith, J.M.,Chemical Engineering Kinetics, 3rdEdition, McGraw-Hill Book Company, p. 554-563 (1981).
Suntola, “Atomic Layer Epitaxy,”Thin Solid Films, 216: 84-89 (1992).
ASM International N.V.
Bushey Scott
Knobbe Martens Olson & Bear LLP
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