Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2006-10-19
2009-06-09
Choi, William C (Department: 2873)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
C359S224200
Reexamination Certificate
active
07545552
ABSTRACT:
Disclosed is a microelectromechanical systems (MEMS) device and method of manufacturing the same. MEMS such as an interferometric modulator include a sidewall spacer formed adjacent to a movable mirror. The sidewall spacer may be a sacrificial spacer that is removed during fabrication, or it may remain in the final product. Increased clearance is provided between the movable mirror and a support structure during actuation of the movable mirror, thereby avoiding contact during operation of the interferometric modulator. The deformable layer may be deposited in a more continuous fashion over the contour of a lower layer as determined by the contour of the sidewall spacer, resulting in a stronger and more resilient deformable layer.
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Choi William C
Knobbe Martens Olson & Bear LLP
Qualcomm Mems Technologies, Inc.
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