Coating processes – Coating by vapor – gas – or smoke
Reexamination Certificate
2011-03-22
2011-03-22
Meeks, Timothy H (Department: 1715)
Coating processes
Coating by vapor, gas, or smoke
C427S255230, C427S255700
Reexamination Certificate
active
07910165
ABSTRACT:
A method of ruthenium layer formation for high aspect ratios, interconnect features is described. The ruthenium layer is formed using a cyclical deposition process. The invention generally provides a method of forming a film on a substrate surface including positioning a substrate within a process chamber, exposing a ruthenium-containing compound to the substrate surface, purging the process chamber with a purge gas, reducing the ruthenium-containing compound with a reductant to form a ruthenium layer on the substrate surface and purging the process chamber with the purge gas. The ruthenium-containing compound is selected from the group consisting of bis(dialkylpentadienyl)ruthenium compounds, bis(alkylpentadienyl) ruthenium compounds, bis(pentadienyl)ruthenium compounds, and combinations thereof.
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Chang Mei
Ganguli Seshadri
Maity Nirmaya
Shah Kavita
Applied Materials Inc.
Gambetta Kelly M
Meeks Timothy H
Patterson & Sheridan LLP
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