Ruthenium compounds, process for their preparation, and...

Details Ruthenium compounds, process for their preparation, and... Ruthenium compounds, process for their preparation, and...

2006-05-16

2006-05-16

Nazario-Gonzalez, Porfirio (Department: 1621)

Organic compounds -- part of the class 532-570 series

Organic compounds

Heavy metal containing

C427S252000

Reexamination Certificate

active

07045645

ABSTRACT:
Bis(cyclopentadienyl)ruthenium complex havimg a content of at least one member selected from among sodium, potassium, calcium, iron, nickel and zinc of 5 ppm or below; and bis(cyclopentadienyl)ruthenium complex incorporated with 10 to 100 ppm of rhenium The complexes are suitable for metalorganic chemical vapor deposition (MOCVD) and can give ruthenium-containing thin film.

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