Routing workpieces based upon detecting a fault

Error detection/correction and fault detection/recovery – Pulse or data error handling – Error count or rate

Reexamination Certificate

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Details

C714S013000

Reexamination Certificate

active

07051250

ABSTRACT:
A method and apparatus is provided for routing workpieces based upon detecting a fault. The method comprises routing a workpiece to a first processing tool identified by a dispatch system, detecting a fault condition associated with the first processing tool and notifying the dispatch system of the detected fault condition. The method further comprises routing a second workpiece to a second processing tool in response to the dispatch system being notified of the fault condition.

REFERENCES:
patent: 5720031 (1998-02-01), Lindsay
patent: 6467049 (2002-10-01), Robins et al.
patent: 6625753 (2003-09-01), Skogman et al.

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