Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
Reexamination Certificate
2005-06-28
2005-06-28
Lee, John R (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Analyte supports
C250S306000, C250S307000, C250S309000, C250S310000, C250S311000, C250S440110, C250S441110, C250S442110, C250S492100, C250S492200, C250S492300, C250S492210, C250S492220
Reexamination Certificate
active
06911656
ABSTRACT:
A mechanical scanning stage for high speed image acquisition in a focused beam system. The mechanical scanning stage preferably is a combination of four stages. A first stage provides linear motion. A second stage, above the first stage, provides rotational positioning. A third stage above the rotational stage is moveable in a first linear direction, and the fourth stage above the third stage is positionable in a second linear direction orthogonal to the first direction. The four stages are responsive to input from a controller programmed with a polar coordinate pixel addressing method, for positioning a specimen mounted on the mechanical stage to allow an applied static focus beam to irradiate selected areas of interest, thereby imaged by collecting signals from the specimen using a polar coordinate pixel addressing method.
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Chan Daniel S. H.
Liu Yong Yu
Phang Jacob C. H.
Jaffer David
Lee John R
National University of Singapore
Souw Bernard E.
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